Features:
n 4”, 6” & 8” chuck sizes n Linear X-Y stage, 2”-2”, 3”-3”, 4”-4”
n Precision Microscope X-Y stage ±25mm n Flexible positioning of fibre 0 to 90°
n Fibre adjustment X-Y-Z, Theta and Yaw n Hard chrome platted platen
n Linear backlash free coaxial X-Y stage n IV/CV measurement applications
n RF probing (East/West configuration) n Suitable for research & clean room
n Anti-vibration foot mounts n More stable with lower gravity centre
n One hand grips both X-Y knobs n One stage for fine and quick positioning
Accessories:
n RF probe/cables n Low current/capacitance probe n High voltage probe
n Hot chuck n Vibration free table n Shielding box/dark enclosure
Specifications:
n Chuck Theta >0.01° fine adjustment n Chuck up/down 4mm
n Steel chuck with individual vacuum switches n Linear backlash free X-Y travel
n Fine position at ~10 micron resolution n Quick motion ~25mm drive per revolution
Dimensions:
n C-6 = 515mm W x 410mm D x 550mm H with microscope, 23kg with microscope
n C-4 = 480mm W x 410mm D x 550mm H with microscope, 23kg with microscope
Station Type | Linear X-Y Chuck Stage | Chuck Up/Down | Chuck Fine Theta | Chuck Size Inch (mm) | Microscope X-Y Travel | U-Shaped RF Chuck | Probe Card Holder | Temp Range |
C-Series | P | P | Optional | 4-8 (100-200) | Optional | Optional | O | RT-700°C |
| C-2-RF | P | Optional | O | 2 (50) | O | P | O | RT-200°C |
EB-Series | P | P | Optional | 4-12 (100-300) | P | Optional | Rectangle | RT-700°C |
BD-Series | P | Platen up/down | Optional | 4-12 (100-300) | P | Optional | Round | RT-700°C |
EB-mmWave | P | P | Optional | 2-12 (50-300) | P | Optional | O | RT-600°C |
Photonic | P | P | P | 4-12 (100-300) | P | P | O | RT-700°C |
Environmental | P | Platen up/down | Optional | 4-8 (100-200) | P | Optional | Round | -60°C-200°C |
Cryogenic | O | O | O | 1-2 (30-50) | P | RF Probes | O | 4K-480K RT-750°C |