HomeProductProbe Stations
EB Chamber Plus Environmental Probe Station
The Chamber Plus probe station offers a sealed environment for an oxygen-free environment and double as a Faraday cage enclosure for extreme limits for probing. While the DUT is enclosed within the chamber, all probing operations such as chuck stage movement, micropositioning, are still readily available. With this product you can achieve the following into your test: Temperature range within -60˚C to 400˚C (Optional 500˚C from RT) Low leakage currents down to 20 fA RF probing up to 67 GHz or higher depending on VNA

Features: 

n Highly stable large knob precision stage  

n Back-lash free movement  

n Mounting for 8 micropositioners  

n Micropositioner standby dock


Accessories: 

n Hot chuck with temperature controller  

n Vibration free table  

n Shielding box


Applications: 

n Basic IV/CV  

n RF, single broadband probing  

n High voltage, high current

Station Specifications
Station Footprint760mm W x 660mm D
Station Height450mm (to Platen)/700mm (to Microscope)
Station Weight80kg
Platen MaterialHard Chrome Plated Steel
Platen Dimension250mm inner, 450mm outer
Platen Capacity8DC or 4RF 4DC
Position MountMagnetic ON/OFF switch
No. of Vacuum Switches4
Platen Z-Motion Range6mm Pneumatic
Platen Z-Fine Resolution1μm
Platen Z MovementGear and Belt (Fine, Lever (Coarse)
Chuck MaterialStainless Steel
Chuck Stage TypeLarge Knob Precision Movement
Chuck Travel Range 6" x 6"
Chuck Quick MovementQuick Y Rail Movement for Easy Sample Loading
Chuck Fine Resolution1 μm
Chuck Theta Coarse Travel20°
Chuck Theta Fine Resolution001°
Large Knob Chuck MovementHigh Precision Linear Stage
Chuck Size6" (150mm)
Chuck Planarity3 μm
Chuck Rigidity15 μm/10N@edge
Chuck Vaccum GroovesCentre, 0.5", 1.5", 2.5" (Individually Controlled)
Chuck Bias CapacityUp to 2kV
Chuck Isolation5 GΩ
DUT Size Range2mm - 150mm
Microscope Stage TypeHigh Precision Linear Stage
Microscope Stage Resolution1 μm
Microscope Stage Travel Range2" x 2"
Microscope Tilting (Optional)35"


Station Type

Linear X-Y Chuck Stage

Chuck Up/Down

Chuck Fine Theta

Chuck Size Inch (mm)

Microscope X-Y Travel

U-Shaped RF Chuck

Probe Card Holder

Temp Range

C-Series

P

P

Optional

4-8 (100-200)

Optional

Optional

O

RT-700°C

C-2-RF

P

Optional

O

2 (50)

O

P

O

RT-200°C

EB-Series

P

P

Optional

4-12 (100-300)

P

Optional

Rectangle

RT-700°C

BD-Series

P

Platen up/down

Optional

4-12 (100-300)

P

Optional

Round

RT-700°C

EB-mmWave

P

P

Optional

2-12 (50-300)

P

Optional

O

RT-600°C

Photonic

P

P

P

4-12 (100-300)

P

P

O

RT-700°C

Environmental

P
Platen up/downOptional4-8 (100-200)POptionalRound-60°C-200°C

Cryogenic

O
OO1-2 (30-50)PRF ProbesO

4K-480K  

RT-750°C



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