Features:
n Highly stable large knob precision stage
n Back-lash free movement
n Mounting for 8 micropositioners
n Micropositioner standby dock
Accessories:
n Hot chuck with temperature controller
n Vibration free table
n Shielding box
Applications:
n Basic IV/CV
n RF, single broadband probing
n High voltage, high current
| Station Specifications | |
| Station Footprint | 760mm W x 660mm D |
| Station Height | 450mm (to Platen)/700mm (to Microscope) |
| Station Weight | 80kg |
| Platen Material | Hard Chrome Plated Steel |
| Platen Dimension | 250mm inner, 450mm outer |
| Platen Capacity | 8DC or 4RF 4DC |
| Position Mount | Magnetic ON/OFF switch |
| No. of Vacuum Switches | 4 |
| Platen Z-Motion Range | 6mm Pneumatic |
| Platen Z-Fine Resolution | 1μm |
| Platen Z Movement | Gear and Belt (Fine, Lever (Coarse) |
| Chuck Material | Stainless Steel |
| Chuck Stage Type | Large Knob Precision Movement |
| Chuck Travel Range | 6" x 6" |
| Chuck Quick Movement | Quick Y Rail Movement for Easy Sample Loading |
| Chuck Fine Resolution | 1 μm |
| Chuck Theta Coarse Travel | 20° |
| Chuck Theta Fine Resolution | 001° |
| Large Knob Chuck Movement | High Precision Linear Stage |
| Chuck Size | 6" (150mm) |
| Chuck Planarity | 3 μm |
| Chuck Rigidity | 15 μm/10N@edge |
| Chuck Vaccum Grooves | Centre, 0.5", 1.5", 2.5" (Individually Controlled) |
| Chuck Bias Capacity | Up to 2kV |
| Chuck Isolation | 5 GΩ |
| DUT Size Range | 2mm - 150mm |
| Microscope Stage Type | High Precision Linear Stage |
| Microscope Stage Resolution | 1 μm |
| Microscope Stage Travel Range | 2" x 2" |
| Microscope Tilting (Optional) | 35" |
Station Type | Linear X-Y Chuck Stage | Chuck Up/Down | Chuck Fine Theta | Chuck Size Inch (mm) | Microscope X-Y Travel | U-Shaped RF Chuck | Probe Card Holder | Temp Range |
C-Series | P | P | Optional | 4-8 (100-200) | Optional | Optional | O | RT-700°C |
| C-2-RF | P | Optional | O | 2 (50) | O | P | O | RT-200°C |
EB-Series | P | P | Optional | 4-12 (100-300) | P | Optional | Rectangle | RT-700°C |
BD-Series | P | Platen up/down | Optional | 4-12 (100-300) | P | Optional | Round | RT-700°C |
EB-mmWave | P | P | Optional | 2-12 (50-300) | P | Optional | O | RT-600°C |
Photonic | P | P | P | 4-12 (100-300) | P | P | O | RT-700°C |
Environmental | P | Platen up/down | Optional | 4-8 (100-200) | P | Optional | Round | -60°C-200°C |
Cryogenic | O | O | O | 1-2 (30-50) | P | RF Probes | O | 4K-480K RT-750°C |