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EverBeing BD-Series - Analytical Probe Station. BD-4, BD-6, BD-8, BD-12
The EverBeing BD series is our top of the line probe station. It’s features and foundation are solid for providing repeatable, accurate measurements in both DC and RF applications. Analytical Probe Station with Vacuum Chuck for 4", 6", 8", 12" Wafer diameter Large Knob for High Precision Stage Back-lash free movement Mounting for up to 12 micropositioners 4.5” Probe Card Holder compatible Platen Height Adjustable Platen Linear Up/Down Micropositioner Standby Dock Microscope Tilting for E-Z lens switching Stainless Steel or Gold Plated Vacuum Chuck

Features: 

n 4”, 6”, 8” & 12” chuck                                       n Coaxial-driven chuck stage  

n RF probing field upgradeable                          n 20X-4000X magnification  

n Backlash free movement                                 n Choice of microscope (tilt) up/down for E-Z  revolving objectives


Accessories: 

n RF probe/cables                          n Active probes                             n Low current/capacitance probe                  n High voltage probe  

n Laser cutter                                  n Ultrasonic cutter                        n CCTV                                                          n Photomicrographics  

n Probe card holder                        n Packaged device holder            n PCB holder                                                 n Thermal chuck 

 n Liquid crystal kit                          n Vibration free table                     n Shielding box                                             n Test bench  

n Instrument case with caster         n Microscope quick lift                  n Dark field/normarski inspection                  n Chuck vacuum pattern  

n Gold plated chuck

Specifications: 

n 6” stainless steel vacuum chuck                                    n Chuck stage 6”x6” travel  

n Chuck theta 0-30°                                                          n Chuck up/down 4mm adjustable  

n 12 micropositioner platen                                               n 1”x1” travel microscope stage  


Dimensions: 

n 660mm W x 660mm D x 700mm H with  microscope  

n 60kg with microscope  


Requirements: 

n Electrical 110VAC, 60Hz, 220VAC, 60Hz  

n Vacuum -250mm Hg, 7 litre/min



Station Type

Linear X-Y Chuck Stage

Chuck Up/Down

Chuck Fine Theta

Chuck Size Inch (mm)

Microscope X-Y Travel

U-Shaped RF Chuck

Probe Card Holder

Temp Range

C-Series

P

P

Optional

4-8 (100-200)

Optional

Optional

O

RT-700°C

C-2-RF

P

Optional

O

2 (50)

O

P

O

RT-200°C

EB-Series

P

P

Optional

4-12 (100-300)

P

Optional

Rectangle

RT-700°C

BD-Series

P

Platen up/down

Optional

4-12 (100-300)

P

Optional

Round

RT-700°C

EB-mmWave

P

P

Optional

2-12 (50-300)

P

Optional

O

RT-600°C

Photonic

P

P

P

4-12 (100-300)

P

P

O

RT-700°C

Environmental

P
Platen up/downOptional4-8 (100-200)POptionalRound-60°C-200°C

Cryogenic

O
OO1-2 (30-50)PRF ProbesO

4K-480K  

RT-750°C



BD4_ProbeStation.pdf

BD8_ProbeStation.pdf


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