Suitable for all types of research or industrial probing applications from DC, RF and mmWave. EverBeing can custom a system to meet your characterisation needs and budget. The C-Series is a cost effecting range of probe stations with the high precision and durability you would expect from a performance probe station but at a lower cost.
Features:
n 4”, 6” & 8” chuck sizes n Linear X-Y stage, 2”-2”, 3”-3”, 4”-4”
n Linear backlash free coaxial X-Y stage n Compact size, lightweight
n Excellent value n IV/CV measurement applications
n RF probing (East/West configuration) n Suitable for research & clean room
n Anti-vibration foot mounts n More stable with lower gravity centre
n One hand grips both X-Y knobs n One stage for fine and quick positioning
Accessories:
n Microscope stage X-Y stage 2”-2” n Monozoom microscope 80-1650X magnification
n RF probe/cables n Fibre optic probing
n Digital camera n Low current/capacitance probe
n High voltage probe n Hot chuck
n Vibration free table n Shielding box/dark enclosure
Model | Weight | Width | Depth | Height (platen/microscope) |
C-2 | 22Kg | 320 | 320 | 180/600 |
C-2-PLUS | 26Kg | 360 | 330 | 180/600 |
C-2-RF | 26Kg | 360 | 330 | 180/600 |
C-4 | 40Kg | 580 | 460 | 180/600 |
C-6 | 42Kg | 580 | 460 | 180/600 |
C-8 | 48Kg | 620 | 460 | 190/610 |
Micro positioner range:
Model | Resolution / TPI | Dimensions | Weight | Bearing Type | DC | RF | mmWave | Fibre Optic | Permanent Magnet | Magnet | Vacuum |
EB-700 | 2 µm / 40 | 38 x 62 x 45 | 200g | Dove Tail | Y | N | N | N | Optional | Standard | Optional |
EB-050-80 | 0.8 µm / 80 | 52 x 96 x 76 | 550g | Linear | Y | Y | N | N | Optional | Standard | Optional |
EB-050-100 | 0.7 µm / 100 | 52 x 96 x 76 | 550g | Linear | Y | Y | N | Y | Optional | Standard | Optional |
EB-005-100 | 0.7 µm / 100 | 90 x 130 x 90 | 1000g | Linear | Y | Y | Y | N | Optional | Standard | Optional |
EB-005-200 | 0.35 µm / 200 | 90 x 130 x 90 | 1000g | Linear | Y | Y | Y | N | Optional | Standard | Optional |
EB-KRF | 1.0 µm | 400 x 270 x 340 | 6500 | Linear | Y | N | Y | Y | Screw to Base / Optical Table | ||
EB-AN125 | 0.8 µm | 110 x 160 x 90 | 1400 | Linear | Y | N | Y | Y | Screw to Probe Station Platen | ||
EB-KRF-C | 1.0 µm | 150 x 150 x 90 | 5500 | Linear | Y | N | Y | Y | Screw to Probe Station Platen | ||
Specifications: n Chuck up/down 4mm n Steel chuck with individual vacuum switches n Linear backlash free X-Y travel n Fine position at ~10 micron resolution n Quick motion ~25mm drive per revolution n Chuck theta at 15° backlash free n Hard chrome plated platen Dimensions: n C-6 = 515mm W x 410mm D x 550mm H with microscope, 23kg with microscope n C-4 = 480mm W x 410mm D x 550mm H with microscope, 23kg with microscope | ||
Station Type | Linear X-Y Chuck Stage | Chuck Up/Down | Chuck Fine Theta | Chuck Size Inch (mm) | Microscope X-Y Travel | U-Shaped RF Chuck | Probe Card Holder | Temp Range |
C-Series | P | P | Optional | 4-8 (100-200) | Optional | Optional | O | RT-700°C |
| C-2-RF | P | Optional | O | 2 (50) | O | P | O | RT-200°C |
EB-Series | P | P | Optional | 4-12 (100-300) | P | Optional | Rectangle | RT-700°C |
BD-Series | P | Platen up/down | Optional | 4-12 (100-300) | P | Optional | Round | RT-700°C |
EB-mmWave | P | P | Optional | 2-12 (50-300) | P | Optional | O | RT-600°C |
Photonic | P | P | P | 4-12 (100-300) | P | P | O | RT-700°C |
Environmental | P | Platen up/down | Optional | 4-8 (100-200) | P | Optional | Round | -60°C-200°C |
Cryogenic | O | O | O | 1-2 (30-50) | P | RF Probes | O | 4K-480K RT-750°C |