Features:
n Compact size 1200mm by 900mm n Vacuum chamber with NW25 ports
n 10 µm resolution micropositioners n RF probing (East/West configuration)
n Fibre optic probing n Vacuum pump for 10-3 Torr environment
n Turbo pump upgrade for 10-6 Torr n Standard 40 chuck
n Microscope Rail for ease of use n Microscope +/-25mm X-Y panning
Accessories:
n 10µm RF micropositioners with theta
n RF/fibre probes
n Triax chuck upgrade
n Hot chuck
n 10-6 Torr turbo pump
Specifications:
n Up to six NW25 micropositioner ports n Standard 40mm chuck, optional 50mm
n Optional triaxial chuck n CH-196 down to 80K
n CG-263 down to 4K n 50l Dewar liquid nitrogen tank supplied
n Anti-vibration table supplied as standard n Triaxial DC or RF micropositioners
Dimensions:
n 1200mm W x 900mm D x 900 H
n Shipping weight 450Kg
n Weight approx. 340Kg
Station Type | Linear X-Y Chuck Stage | Chuck Up/Down | Chuck Fine Theta | Chuck Size Inch (mm) | Microscope X-Y Travel | U-Shaped RF Chuck | Probe Card Holder | Temp Range |
C-Series | P | P | Optional | 4-8 (100-200) | Optional | Optional | O | RT-700°C |
| C-2-RF | P | Optional | O | 2 (50) | O | P | O | RT-200°C |
EB-Series | P | P | Optional | 4-12 (100-300) | P | Optional | Rectangle | RT-700°C |
BD-Series | P | Platen up/down | Optional | 4-12 (100-300) | P | Optional | Round | RT-700°C |
EB-mmWave | P | P | Optional | 2-12 (50-300) | P | Optional | O | RT-600°C |
Photonic | P | P | P | 4-12 (100-300) | P | P | O | RT-700°C |
Environmental | P | Platen up/down | Optional | 4-8 (100-200) | P | Optional | Round | -60°C-200°C |
Cryogenic | O | O | O | 1-2 (30-50) | P | RF Probes | O | 4K-480K RT-750°C |
