HomeProductProbe Stations
SR/KSR-Series Four Point Probe Stations
Everbeing’s four point probe uses the four co-linear probes on contact to determine the sheet resistance of your wafer or thin films. The method uses the four terminal sensing or “Kelvin” approach by using separate junctions for voltage and current instead of through the same connection. As a result, internal resistance, lead or contact resistance is reduced and lower ohm values can be read.

Features: 

n True vertical up/down                             n Individually contant spring loaded pin                          n Constant pin spacing  

n Ultimate repeatability                             n Probe head E-Z changeover                                         n Probing Z position adjustable on top  

n Sturdy feed thru panel at rear side        n Feedthru choice Banana/BNC/Triaxial  Female            n Chuck quick move available  

n Hot chuck available                                n Shielding box available                                                 n 4", 6", 8" Dia. choice  

n Other probe heads available


Accessories: 

n Hot chucks                                              n Vacuum chucks  

n Chuck quick move available                   n Shielding box  

n Test bench                                              n Instrument case with caster


Requirements: 

n Current source  

n Voltage meter


Applications: 

n Sheet resistivity                                      n Slice resistivity  

n Doping quality                                         n Metallisation thickness  

n P/N typing                                               n V/I measurement

Specifications: 

n Chuck 4", 6", 8" dia. Teflon                                              n Head up/down 10mm  

n Probing Z resolution 1 micron                                         n Probe pin material Tungsten Carbide  

n Probe pin spacing 40 mil, 50 mil, 62.5 mil                       n Probe pin spring 45g, 85g, 180g  

n Probe pin radius 40.6 micron

KSR-4:

n Chuck Size: ~ 12″

n Square/Round Chuck Selectable

n Z Up/Down: 30mm

n Z Resolution: 20um

n 1ea 4 Point Head

注册账号
登录账号
还没有账号?立即注册
警告弹窗