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Everbeing EB Series - Enhanced Probe Station
The Everbeing EB-Series probe stations are designed for DC, RF, Fibre and mmWave probing. The heavier base offers a lower centre of gravity for improved stability and is supplied with a thicker platen to allow probe cards to be fitted. The EB series is available in 4-12 inch (100-300mm) contains features to step-up your usability to acquire the accurate data you need from your devices. Four models are available EB-4, EB-6, EB-8, EB-12 with optional Hot chuck, standard or enhanced coaxial or triaxial isolation for low noise measurements.

The EB series of probe staions from EverBeing offer high quality, precision probing solution for devices and full wafers. Available with 4, 6, 8 & 12 inch chucks, they can be used for many different applications, including device characterisation, failure analysis, design validation and wafer level reliability. 

Features: 

n 4”, 6”, 8” & 12” chuck                                   n Coaxial-driven chuck stage  

n RF probing field upgradeable                      n 20X-4000X magnification  

n Backlash free movement                              n Choice of microscope (tilt) up/down for E-Z  revolving objectives


Accessories: 

n RF probe/cables                       n Active probes                           n Low current/capacitance probe                  n High voltage probe  

n Laser cutter                               n Ultrasonic cutter                      n CCTV                                                          n Photomicrographics  

n Probe card holder                     n Packaged device holder          n PCB holder                                                 n Thermal chuck  

n Liquid crystal kit                        n Vibration free table                  n Shielding box                                              n Test bench  

n Instrument case with caster      n Microscope quick lift                n Dark field/Nomarski inspection                   n Chuck vacuum pattern  

n Gold plated chuck

Specifications: 

n 6” stainless steel vacuum chuck                                                  n Chuck stage 6”x6” travel  

n Chuck theta 0-30°                                                                        n Chuck up/down 4mm adjustable  

n 12 micropositioner platen                                                             n 1”x1” travel microscope stage


Dimensions: 

n 580mm W x 460mm D x 700mm H with  microscope                  n 60kg with microscope  


Requirements: 

n Electrical 110VAC, 60Hz, 220VAC, 60Hz                                     n Vacuum -250mm Hg, 7 litre/min



Station Type

Linear X-Y Chuck Stage

Chuck Up/Down

Chuck Fine Theta

Chuck Size Inch (mm)

Microscope X-Y Travel

U-Shaped RF Chuck

Probe Card Holder

Temp Range

C-Series

P

P

Optional

4-8 (100-200)

Optional

Optional

O

RT-700°C

C-2-RF

P

Optional

O

2 (50)

O

P

O

RT-200°C

EB-Series

P

P

Optional

4-12 (100-300)

P

Optional

Rectangle

RT-700°C

BD-Series

P

Platen up/down

Optional

4-12 (100-300)

P

Optional

Round

RT-700°C

EB-mmWave

P

P

Optional

2-12 (50-300)

P

Optional

O

RT-600°C

Photonic

P

P

P

4-12 (100-300)

P

P

O

RT-700°C

Environmental

P
Platen up/downOptional4-8 (100-200)POptionalRound-60°C-200°C

Cryogenic

O
OO1-2 (30-50)PRF ProbesO

4K-480K  

RT-750°C



EB-6 ProbeStation.pdf

EB-8 ProbeStation.pdf


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