HomeProductHigh temperature system
EverBeing Probe Station Hot Chuck
The high-temperature system consists of a high-temperature chuck, a temperature controller, and a cooling water tank. High temperature chuck sizes can be customized from 2 inches to 16 inches, temperature control range: room temperature ~+700 ℃, temperature control accuracy:+/- 0.5℃

Everbeing offer a range of round and square hot chucks for heating your samples DUT to a specified temperature and controlled to less that 1°C when using a chiller circuit. They come in a range of sizes from 2-inch (50mm) to 8 inch (200mm) and are available in standard round or can be supplied square.    



For very low current measurements we can offer a coaxial or triaxial isolation kit. The isolation kit that raises and insulates the chuck by using quartz or ceramic as a safe isolation layer. Heat will still travel up to the chuck surface and prevents voltage breakdown leaking down to the coil. These when used with shielding boxes, triaxial cables and antivibration tables can allow measurements to around 10fA.



We do not allow for any form of biasing to the standard hot chuck since there’s very little insulation between the chuck plate and heating coil. Therefore, the hot chuck should only be grounded and never biased.



We can attach a SHV or MHV high voltage connector to this, your connection may not be BNC and therefore may be SHV or MHV specification (which are all coax connections). Please state what connector you need at time of purchase.


Features: 

n Low noise DC powered chuck                                                  n Isolation kit for pico amp measurement  

n Cooling buffer to protect stage underneath                            n Mountable for most probe station makes  

n Transferable type no need for  mounting adapter


Accessories: 

n Temp up to 300°C, 400°C, 500°C,  600°C, 700°C                      n Temp down to 5°C, -50°C, -65°C or  Cryogenics 77°K  

n Mounting adapter for other probe  station makes                  n Square chuck on request  

n Better accuracy on request                                                       n Better uniformity on request  

n Faster ramping on request                                                        n Water cooling tank  

n Isolation kit for low current                                                       n Liquid crystal kit  

n Vacuum chamber                                                                        n CV measurement enclosure  

n Test bench                                                                                  n Instrument case with caster  

n Chuck vacuum pattern                                                              n Gold plated chuck  

n Nickel plated chuck


Requirements: 

n Electrical 110 VAC, 60Hz / 220 VAC, 60Hz                                 n Power consumption 4” 700W, 6” 1000W,  8” 1500W  

n Vacuum -250mm Hg, 7 litre/min                                                  n Tap water 20 litres/min

Specifications: 

n 4”, 6”, 8” dia. x 1” thick vacuum chuck size                                n +/-10 micron chuck planarisation  

n 4 digits LED readout PID controller                                            n Temp range RT ~ 200°C  

n Temp resolution 0.1°C                                                                n Temp accuracy 100°C +/-0.5°C,  200°C +/- 1°C  

n Heating up from 25°C (4” typically in min.)  100°C (2:00), 150°C (3:30) 200°C (5:00)  

n DC power to heater                                                                    n Stainless steel


Dimensions (Controller): 

n 350mm W x 300mm D x 150mm H  

n Weight 20Kg


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