Features:
n U-chuck holds DUT plus calibration substrate n Affordable price
n Ideal for wafers of less than 2” n IV/CV measurement applications
n RF probing (East/West/North/South configuration) n Same coaxial stage as fitted on full size probe stations
n Single knob design for fine and quick positioning as well as X-Y single hand operation
n Low gravity centre for stability n Fits into glove box
Accessories:
n Digital camera up to 300x magnification n RF probe/cables
n Low current/capacitance probe n High voltage probe
Specifications:
n 2” steel D-shaped chuck with vacuum switch n Coaxial stage with 2”-2” linear backlash free travel
n Fine position at ~10 micron resolution n Quick motion at ~25mm drive per revolution
n Chuck theta at 15° backlash free
Dimensions:
n 360mm W x 330mm D x 320mm H n 22kg with digital camera and 4 positioners
Station Type | Linear X-Y Chuck Stage | Chuck Up/Down | Chuck Fine Theta | Chuck Size Inch (mm) | Microscope X-Y Travel | U-Shaped RF Chuck | Probe Card Holder | Temp Range |
C-Series | P | P | Optional | 4-8 (100-200) | Optional | Optional | O | RT-700°C |
| C-2-RF | P | Optional | O | 2 (50) | O | P | O | RT-200°C |
EB-Series | P | P | Optional | 4-12 (100-300) | P | Optional | Rectangle | RT-700°C |
BD-Series | P | Platen up/down | Optional | 4-12 (100-300) | P | Optional | Round | RT-700°C |
EB-mmWave | P | P | Optional | 2-12 (50-300) | P | Optional | O | RT-600°C |
Photonic | P | P | P | 4-12 (100-300) | P | P | O | RT-700°C |
Environmental | P | Platen up/down | Optional | 4-8 (100-200) | P | Optional | Round | -60°C-200°C |
Cryogenic | O | O | O | 1-2 (30-50) | P | RF Probes | O | 4K-480K RT-750°C |