Home Applications Measurement under magnetic field environment
Hall Effect System
The probe station can be equipped with electromagnetic field coils to establish a current adjustable magnetic field environment, and a heating and temperature control chuck can also be installed to measure the electrical signals of the wafer in a hot environment.

Simple type (up to 1000 Gauss): The coil is directly placed horizontally below the chuck, like a typical probe station.

Advanced version (up to 2 Tesla/2000 Gauss): A pair of high-intensity magnetic field coils are configured to slide on a left and right track. When loading the object to be tested, the magnetic field must be moved away first, and the object must be adsorbed on the chuck while flipping vertically. The probe is placed in the appropriate position through the microscope field of view, and then the high-intensity coil is clamped in the direction of the chuck. After confirming the current magnetic field size with a Gauss meter, electrical signal measurement can begin.


• 3000 Gauss
• Vacuum Chuck 2" diameter
• Coaxial Stage X-Y Range 2"-2"
• Vacuum Source -250mmHg Required
• Chuck Stage Resolution: 10 μm
• Chuck Quick Motion: 25 mm
• Chuck Quick Z-Motion: 4mm
• Chuck Z-Resolution: 1 μm
• Chuck Theta: 15˚ backlash free
• Left and Right rail for Coiled Bobbin Frame allowing magnet strength to change
• Coiled Bobbin Frame provides no Cooling
• Magnet Power Supply included with Gaussmeter
• Aluminum Front and Rear Platen


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